SIRC provides one of Japan’s leading microfabrication and evaluation environments, centered on the Main Building (cleanroom: 600 m²) and the Nano Building (cleanroom: 150 m²), enabling an integrated workflow for MEMS/LSI processes, design, evaluation, and prototyping. It is operated as a hybrid hub for research and development × shared use, combining two core functions: a “research and development function,” in which researchers from within and outside the university utilize the facilities to prototype and demonstrate cutting-edge devices themselves, and a “research support function,” which supports a wide range of research activities through equipment maintenance, technical training, and process consultation. In addition, equipment maintenance and management are carried out by users, including faculty, staff, and students, serving as an educational platform that deepens understanding of equipment and processes while simultaneously promoting advanced research.

The organizational structure is built on four pillars: (1) advanced packaging and heterogeneous integration, (2) advanced sensing, (3) silicon photonics, and (4) shared use (functional succession). It accelerates development with a scope that includes prototyping, evaluation of heterogeneous materials, and system-level demonstration—areas that are difficult to address in mass production lines. By inheriting and expanding the highly utilized shared infrastructure from the former MNC era (over 50 laboratories, approximately 300 registered users, and more than 44,000 hours of annual usage), SIRC contributes to next-generation smart system technologies, as well as practical education and the development of researchers, through collaboration and co-creation within and beyond the university.