R&D Hub for MEMS Design and Process
This hub promote MEMS R&D from basic research to social implementation based on industry-academia-government co-creation by utilizing Japan's largest and world-class MEMS R&D resources Using an open prototype manufacturing equipment that supports small pieces up to 200 mm, it is possible to proceed research and development for various purposes such as MEMS, high-frequency devices, and optical devices.
Since all processes can be supported by experienced staff, Human resources development is also carried out at the same time as R & D.
![](https://semicon.tohoku.ac.jp/wp/wp-content/themes/php/images/hub3/table-en.jpg)