RESEARCH SEEDS
- Micro System Ingegration Center (μSIC）
- Graduate school of Biomedical Engineering
- Center for Innovative Integrated Electronic Systems (CIES)
- School of Engineering
- New Industry Creation Hatchery Center (NICHe)
- Advanced Institute for Materials Research (AIMR)
- Research Institute of Electrical Communication (RIEC)
Manufacturing Process/Equipment
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Micro/Nano Bubble Technology for Semiconductor Manufacturing
Specially Appointed Professor
Masayoshi Takahashi
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Development of high-performance semiconductor plasma equipment and process technology
Specially Appointed Professor
Tetsuya Goto
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Ultra-clean technology for semiconductor manufacturing
Specially Appointed Professor
Yasuyuki Shirai
