RESEARCH SEEDS

Ultra-clean technology for semiconductor manufacturing


Professor

Yasuyuki Shirai

Message

We are deepening and evolving the development of materials and components for advanced semiconductor-grade ultra-clean equipment, as well as outgassing and particle contamination measurement and evaluation technologies—fields in which Tohoku University has long led the world. These infrastructure technologies serve not only as the foundation for the advanced semiconductor sector but are also being expanded into other manufacturing industries. Additionally, we provide cleanroom facilities and equipment as a venue for open innovation.