• Center for Innovative Integrated Electronic Systems(CIES)

    1,900㎡ CR & 300mm-Wafer line

  • New Industry Creation Hatchery Center (NICHe) Fluctuation Free Facility (FFF)

    Process floor : 739㎡/630㎡ (P2/ P1)

  • Micro System Integration Center (μSIC)(Jun-ichi Nishizawa Memorial Research Center)

    1,800㎡ Super CR, Prototype development with 4/6inch-wafer & Advanced Fusion Lab.(3F CR)

  • Material Innovation Center

    An open innovation center in the field of material science, 400㎡, where accommodates researchers from Tohoku university and the Univ. Start-ups

  • Institute for Advanced Synchrotron Light Source, National Inst. for Quantum Science and Technology(QTS)

    scheduled to operate in 2023

  • Bldg. 2, Electrical Engineering and Applied Physics, Dept. of Electrical, Information and Physics Engineering


  • Micro/Nano-Machining Research and Education Center


  • Laboratory for Nanoelectronics and Spintronics, RIEC