FACILITY
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Center for Innovative Integrated Electronic Systems（CIES）
1,900㎡ CR & 300mm-Wafer line
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New Industry Creation Hatchery Center (NICHe) Fluctuation Free Facility (FFF)
Process floor : 739㎡／630㎡ (P2／ P1)
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Micro System Integration Center (μSIC)(Jun-ichi Nishizawa Memorial Research Center)
1,800㎡ Super CR, Prototype development with 4/6inch-wafer & Advanced Fusion Lab.(3F CR)
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Material Innovation Center
An open innovation center in the field of material science, 400㎡, where accommodates researchers from Tohoku university and the Univ. Start-ups
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Institute for Advanced Synchrotron Light Source, National Inst. for Quantum Science and Technology(QTS)
scheduled to operate in 2023
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Bldg. 2, Electrical Engineering and Applied Physics, Dept. of Electrical, Information and Physics Engineering
350㎡
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Micro/Nano-Machining Research and Education Center
750㎡（600㎡+150㎡）
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Laboratory for Nanoelectronics and Spintronics, RIEC
1,400㎡
