Tohoku University|Technology Co-creation for Semiconductor of Tohoku University
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RESEARCH SEEDS

Stable supply of high-purity materials for semiconductors

Material
New Industry Creation Hatchery Center (NICHe)

Professor

Tetsuya Nagasaka

http://www.material.tohoku.ac.jp/~tekko/index.html

Message

We are developing a new technology to circulate high-purity phosphoric acid, hydrofluoric acid, etc., which are strategic materials for economic security essential for semiconductor manufacturing, within the semiconductor manufacturing line.


  • Energy
  • Sensing
  • Bio
  • Packaging
  • Information Processing
  • Material
  • Device
  • Manufacturing Process/Equipment
  • Evaluation/Analysis
  • Communication
  • Integrated Circuit

  • Micro System Ingegration Center (μSIC)
  • Graduate school of Biomedical Engineering
  • Center for Innovative Integrated Electronic Systems (CIES)
  • School of Engineering
  • New Industry Creation Hatchery Center (NICHe)
  • Advanced Institute for Materials Research (AIMR)
  • Research Institute of Electrical Communication (RIEC)

CONTACT


We welcome contacts from companies interested in research on semiconductors at our university.

Tohoku University|Technology Co-creation for Semiconductor of Tohoku University
  • Value to create
  • Foundation of value creation
  • About us
  • Research
  • Contact us
  • Japanese

Head office of Enterprise partnership, Tohoku University

tel.+81-22-795-5275 (One-stop service)

© Tohoku University|Technology Co-creation for Semiconductor of Tohoku University