RESEARCH SEEDS

Ultra-clean technology for semiconductor manufacturing


Specially Appointed Professor

Yasuyuki Shirai

Message

We are developing ultra-clean equipment materials, outgassing and contamination measurement technologies for advanced semiconductor-grade that Tohoku University has cultivated over many years. These infrastructure technologies are not only basic technologies in the field of advanced semiconductors, but also useful in other manufacturing industries.

We also provide clean room facilities and equipment as an open innovation platform.